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Text File | 1996-04-15 | 638 b | 22 lines | [TEXT/ILIA] |
- 2DINESE, Vers. 1.0
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- Future plans.
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- 1. Include void regions.
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- 2. Include angular dependent deposition rate for Directional deposition processes.
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- 3. Include a non-uniform flux distribution for Directional (etching and deposition) processes.
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- 4. Include a selective deposition process.
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- 5. Introduce user definable segment length limits and minimum thickness criterion.
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- 6. Steadily develop more elaborate lithographic processes.
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- 7. Develop more flexible graphical tools for mask as well as for region definition.
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- 8. Improve the interface.
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- The extent of this future development will, of course, depend on the interest in the program.